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【Member News】GAREN · New Development -- Casting Method Successfully Grew Ultra-Thick 6 Inch Gallium Oxide Single Crystal

日期:2024-10-31阅读:167

      In October 2024, Hangzhou GAREN SEMI Co., LTD., using the Second-Generation Casting Technology independently developed, successfully grew ultra-thick 6 inches Gallium Oxide single crystal, the bulk thickness can reach more than 20mm!

ultra-thick 6-inch Gallium Oxide single crystal

      As a new kind of ultra-wide bandgap semiconductor material, Gallium Oxide is becoming one of the most concerned materials in the semiconductor field because of its excellent electrical properties. Gallium Oxide single crystal substrate products are mainly used in power electronic devices for national grid, new energy vehicles, rail transit, 5G communication and other fields, among which high-voltage and high-power devices are the main application fields. Compared with the current mainstream third-generation semiconductor material Silicon Carbide, Gallium Oxide can achieve higher working current and voltage in the production of power devices, while having smaller on-resistance and power consumption.

      However, the price of Gallium Oxide single crystal material is always high, and the price of single crystal substrate of the same size is more than 10 times that of Silicon Carbide, which seriously hinders the large-scale application of Gallium Oxide related device technology. In order to reduce the cost of Gallium Oxide single crystal substrate, increasing the thickness of single crystal bulk is the most direct and effective method. At present, ultra-thick single crystal is still a difficult problem to achieve for the growth methods of single crystal of large size of Gallium Oxide of 6 inches and above.

      After more than a year of research and development, the research and development team of GAREN SEMI has finally grown more than 20mm Gallium Oxide single crystal through major improvements in casting technology. It is understood that the thickness of single crystal bulk under the same diameter has reached the international leading, which is 2-3 times thicker than EFG bulk. At the same time, combined with the ultra-thin substrate processing technology of GAREN SEMI, the wafer output of a single bulk can reach 3-4 times of the original, and the cost of a single wafer can be reduced by more than 70%. In addition, increasing the thickness of Gallium Oxide single crystal bulk is more conducive to the preparation of large-size substrates with various crystal orientations and mis-cut angle (about 12mm thick bulk are required for 6-inch and 4-degree mis-cut angle) to meet the special needs of different epitaxy and device links downstream.

      Hangzhou GAREN SEMI Co., Ltd. will continue to carry out independent innovation under the guidance of Chief Advisor Academician Yang Deren, constantly iterating to improve casting technology, grow larger size and thicker Gallium Oxide single crystal, further develop Gallium Oxide single crystal processing and defect control technology, to achieve equipment manufacturing, crystal growth, substrate processing technology closed loop. Gradually breaking through the lower cost and higher quality large-size Gallium Oxide single crystal substrate, support to realize the large-scale application of Gallium Oxide technology.

 

Company Profile

      Hangzhou GAREN SEMI Co., Ltd. was established in September 2022, is a technology enterprise focusing on the research and development, production and sales of Gallium Oxide and other semiconductor materials. The company has created a new technology for Gallium Oxide single crystal growth, and has more than ten international and domestic invention patents, breaking through the monopoly and blockade of Western countries such as the United States and Japan on Gallium Oxide substrate materials. Based on solving the major national needs, GAREN SEMI will be deeply engaged in the continuous innovation of the Gallium Oxide upstream industry chain, and strive to provide product guarantee for the development of China's power electronics and other industries.

For more information about GAREN SEMI and its products

Please visit our official website: http://garen.cc/

Or contact us:

Mr. Jiang :15918719807

Email: jiangjiwei@garen.cc

Mr. Xia :19011278792

Email:xianing@garen.cc