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【International Papers】Ag/Ga₂O₃/n-Si Schottky-type photodetector for visible light detection

日期:2025-07-07阅读:35

      Researchers from the Suleyman Demirel University have published a dissertation titled "Ag/Ga2O3/n-Si Schottky-type photodetector for visible light detection" in Journal of Materials Science: Materials in Electronics.

 

Background

      Ga2O3-based photodetectors can be enhanced to detect light over a wide spectrum with their excellent high sensitivity performance . The aim of this study is to combine infrared absorption of Si and UV absorption of Ga2O3 to obtain visible light photodetectors. In this work, Ga2O3 nanostructures were deposited on an n-Si substrate by electrodeposition technique, and their structural and morphological properties were examined by XRD, SEM and EDX analysis. As a result, grain sizes, surface morphologies, and chemical compositions of Ga2O3 nanostructure samples were determined. Afterward, the photodetector structures of Ga2O3 samples were designed and fabricated. The characterizations of the fabricated heterojunctions were obtained by I-V measurements for various light power illumination intensities and various wavelengths. Thus, photodetector parameters such as responsivity, detectivity, and EQE of the Ag/Ga2O3/n-Si Schottky photodetector were extracted.

 

Abstract

      Gallium oxide (Ga2O3) is an ultra-wide band gap material which has been receiving increasing interest for its potential applications in power electronics, ultraviolet (UV) photodetectors, and gas sensors. In this study, we have synthesized β-phase Ga2O3 on n-Si substrate using the electrodeposition technique, and investigated its properties for use in photodetector applications for broadband detection combining Si and Ga2O3. X-ray diffractometer (XRD), scanning electron microscope (SEM) with energy dispersive x-ray (EDX) analysis were conducted to illuminate structural and morphological behaviors of the Ga2O3. Ag metallic contacts on the Ga2O3/n-Si junction and Al ohmic contact on the back surface of the n-Si were obtained by thermal evaporation technique. Thus, Ag/Ga2O3/n-Si Schottky-type photodetectors were fabricated and characterized by current–voltage (I-V) measurements depending on various light power intensities and wavelengths ranging from UV to near-infrared (NIR). The diode characteristics, as well as the photodetection parameters such as responsivity, specific detectivity, and external quantum efficiency (EQE) were determined and discussed in detail. The Ag/Ga2O3/n-Si Schottky-type photodetectors showed high performances: 122.88 A/W responsivity, 1.07 × 1012 Jones specific detectivity, and very high EQE value of 2.18 × 104% at 700 nm wavelength. The obtained Ag/Ga2O3/n-Si Schottky-type photodetector exhibits promising potential as a candidate for optoelectronic applications in the visible range. These photodetectors can be used in visible light communication, light sensing and cameras.

 

Conclusion

      We synthesized Ga2O3 nanostructures on n-Si substrates by electrodeposition technique and characterized the structures by XRD, SEM, and EDX analysis. The XRD pattern confirmed the monoclinic crystalline structure of the β-phase Ga2O3 nanostructures, and the crystalline size was determined at about 15–40 nm by various methods. While the SEM image revealed rod-like structures on the surface of n-Si, EDX analysis confirmed stoichiometry Ga2O3. The Ga2O3/n-Si heterostructures were coated with Ag contacts to fabricate Ag/Ga2O3/n-Si Schottky-type photodetector. Ag/Ga2O3/n-Si was characterized by I-V measurements for various light power densities for AM 1.5 sunlight and wavelengths from 351 to 800 nm at 30 mW/cm2. The device parameters of the Ag/Ga2O3/n-Si junction were extracted from I-V characteristics using thermionic emission theory, Norde, and Cheung methods. The ideality factor and barrier height values were obtained as 2.53 and 0.62 eV, respectively. The photocurrent, photosensitivity, responsivity, and specific detectivity values were determined for light power density and wavelength changes. The Ag/Ga2O3/n-Si Schottky-type photodetector has exhibited 122.88 A/W responsivity, 1.07 × 1012 Jones specific detectivity at 700 nm wavelength value. The photodetector exhibited a very high EQE value of 2.18 × 104% at 700 nm, demonstrating good optoelectronic characteristics from UV to NIR region.

Fig. 1. a Schematic diagram and measurement setup, b optical microscope image and c energy band diagram of the fabricated Ag/Ga2O3/n-Si Schottky-type photodetector.

Fig. 2. a XRD pattern and b modified Scherrer plot of Ga2O3 nanostructures

 

DOI:

doi.org/10.1007/s10854-025-14892-y