【Device Papers】Mg-doped β-Ga₂O₃ thin films for solar-blind ultraviolet photodetector
日期:2026-01-07阅读:72
Researchers from the University of Electronic Science and Technology of China have published a dissertation titled "Mg-doped β-Ga2O3 thin films for solar-blind ultraviolet photodetector" in Applied Surface Science.
Abstract
Beta gallium oxide (β-Ga2O3) is a promising material for solar-blind photodetectors owing to its suitable bandgap. However, the presence of oxygen vacancies often induces high dark current and trap states, limiting the device performance. In this work, magnesium-doped β-Ga2O3 [((MgGa)2O3)] thin films with different Mg concentrations were grown by molecular beam epitaxy (MBE). Metal–semiconductor–metal (MSM) photodetectors were then fabricated on these films. The device with a Mg concentration of 7.8 at% exhibited the best performance, achieving a photo-to-dark current ratio of 1.3 × 107, a specific detectivity of 2.1 × 1015 Jones, and fast rise/decay times of 22.9 ms and 2.9 ms, respectively. Additionally, a superlinear photoresponse was observed, which was explained using a recombination-centers model. These results demonstrate that (MgGa)2O3 thin films are highly promising for high-performance solar-blind photodetectors.
DOI:
https://doi.org/10.1016/j.apsusc.2025.165700

