【Member Intro】Fermion Instruments（Shanghai）Co.,Ltd —— Regular Member

Company Profile

      Fermion Instruments, established in 2012 and headquartered in Shanghai, is an advanced electronic material research and development, preparation, and measurement equipment provider. The company's unwavering dedication to harnessing the power of scientific principles drives our pioneering of new technologies, processes, and materials in advanced instruments and equipment.

      Over a decade of dedicated development, Fermion Instruments has consistently championed the “independent research and development + technological innovation” approach in the four technical fields of ultra-high vacuum, low temperature, film preparation, and plasma. This commitment has led to a rich technology portfolio and a mature product line, widely adopted and acknowledged by renowned universities, research institutions, and industrial customers domestically and internationally.

      At Fermion Instruments, we take pride in our workforce of over 360 highly skilled employees. Our team, the majority of whom are alums of the prestigious 985 colleges and universities with overseas doctoral experience, forms the backbone of our success. Our facilities, spanning over 20,000m2 of independent R&D and production space in Shanghai (headquarters) and Nanjing (subsidiary), are a testament to our robust infrastructure. This, coupled with our self-research and self-production capabilities, has enabled us to provide comprehensive production management and professional after-sales service, earning the trust and recognition of numerous domestic and international customers.

      Fermion Instruments has attracted several financing rounds in recent years and demonstrated solid financial strength. This economic stability is a testament to our ability to provide comprehensive support and guarantee for our long-term operations and project development. Our success, recognized by the Ministry of Industry and Information Technology, a specialized new “little giant” enterprise, Shanghai specialized unique new enterprise, Shanghai high-tech enterprise, and many other honors, is a testament to our credibility and achievements.

Business Profile

      As a leading MBE equipment manufacturer in China, Fermion Instruments is dedicated to advancing molecular beam epitaxy technology. We have amassed a wealth of experience in ultra-high vacuum equipment, mechanical design, epitaxy processes, and software development. This expertise has positioned us as one of the few manufacturers in China capable of offering a “one-stop total solution” for compound semiconductor epitaxy customers, inspiring confidence in the potential of our collaboration.

      The core technical components of our self-developed molecular beam epitaxy equipment include a thermal evaporation source, high-flux RF plasma source, substrate heater, automatic sample transfer robot arm, etc., all of which have advanced technical advantages in the industry. Our customers cover all kinds of well-known scientific research institutes, universities, and domestic and international semiconductor enterprises. From high-performance standard components to customized equipment, we have won the praise and trust of customers.

      Relevant scientific research units have used the MBE equipment produced by Fermion Instruments to publish high-level papers in the fields of high-power/high-frequency electronic devices, spintronics materials, two-dimensional materials, and shared research results with global scientific researchers to jointly promote the development of next-generation compound semiconductor devices. Customers using our MBE systems are making significant progress in growing a new type of ultra-wideband gap semiconductor, Gallium Oxide, expected to achieve high-quality Gallium Oxide epitaxy films, further driving the development of a new generation of semiconductor-related industries.

Technological Advances

      Molecular beam epitaxy (MBE) machine and core components

      Fermion Instruments can provide an MBE machine and core components, a furnace source, and other components compatible with the user's existing imported MBE system. We can provide customized system development for new materials and quantum devices.

Technical Features:

1. Cover single to multi-piece substrate MBE machine and furnace source, substrate heater, and other core components; Meet the traditional GaAs, InP optoelectronics, and RF device epitaxy;

2. Based on plasma-assisted MBE equipment to meet the epitaxy requirements of GaN, Ga₂O_3, and other new devices;

3. Plasma-assisted hybrid MBE can directly epitaxy oxides on nitride devices and use the extremely high dielectric constant of oxides such as perovskite to realize the development of new high-frequency and high-power RF power devices.

Progress Stage:

      Has a whole series of MBE furnace sources and other core components supply capacity. At present, MBE single-chip 3inch, single-chip 4inch, single-chip 8inch, and multi-chip 3inch and 4inch MBE complete machines have been sold for epitaxy of GaAs devices, Gallium Nitride and Gallium Oxide, and other new material devices. Typical customers are head semiconductor companies and major research institutes, such as Hangzhou Fujia SIP Technology, Hubei Jiufengshan Laboratory, Shanghai Institute of Technical Physics, Hefei National Laboratory for Quantum Information Science, CETC13, CETC55.