【Domestic Papers】Amorphous Ga₂O₃-based solar-blind photodetectors on crystalline and amorphous substrates: A comparative study

      Researchers from the Fuzhou University have published a dissertation titled "Amorphous Ga₂O₃-based solar-blind photodetectors on crystalline and amorphous substrates: A comparative study " in Materials Science in Semiconductor Processing.

Abstract

      Amorphous Ga₂O₃ thin films were deposited on SiO₂ and sapphire substrates by pulsed magnetron sputtering (PSD) at room temperature, respectively. Corresponding amorphous Ga₂O₃ thin film photodetectors were prepared. The oxygen vacancies and defects of the interface between films and substrates were found to determine the discrepancy by comparing the performance between these two photodetectors. Amorphous Ga₂O₃ photodetectors on SiO₂ had highly performances with a responsivity of 417 A/W, detectivity of 7.84 × 10¹² Jones, and external quantum efficiency of 2.01 × 10⁵ %.

DOI：doi.org/10.1016/j.mssp.2024.108491