【International Papers】Non-linear effects in α-Ga₂O₃ radiation phenomena

      Researchers from the Peter the Great St.-Petersburg Polytechnic University have published a dissertation titled "Non-linear effects in α-Ga₂O₃ radiation phenomena" in APL Materials.

Abstract

      The rhombohedral phase of gallium oxide (α-Ga₂O₃) is of interest because of its highest bandgap among the rest of the Ga₂O₃ polymorphs, making it particularly attractive in applications. However, even though the ion beam processing is routinely used in device technology, the understanding of radiation phenomena in α-Ga₂O₃ is not mature. Here, we study non-linear effects for radiation disorder formation in α-Ga₂O₃ by varying both the defect generation rate and the density of collision cascades, enabled by comparing monoatomic and cluster ion implants, also applying systematic variations of ion fluxes. In particular, we show that the collision cascade density governs the surface amorphization rates, also affected by the ion flux variations. These trends are explained in terms of the non-linear in-cascade and inter-cascade defect interactions occurring during ballistic and dynamic defect annealing stages. As such, these data reveal new physics of the radiation phenomena in α-Ga₂O₃ and may be applicable for more predictive ion beam processing of α-Ga₂O₃-based devices.