【Member News】China Resources Microelectronics Limited Leads Review Meetings for Draft Group Standards:"Non-Destructive XRT Detection of Defects in Gallium Oxide Materials"

      From June 12th to 13th, 2025, under the guidance of the China Electronic Materials Industry Association and the National Semiconductor Materials Standardization Sub-Technical Committee, The Semiconductor Materials Industry Association of China Electronic Materials Industry organized and held a draft review meeting for " Testing Method for Dislocation Density of Gallium Oxide Single Crystal" and "β-Phase Gallium Oxide Homoepitaxial Wafer " in Kaihua, Zhejiang Province, as well as a project initiation meeting for group standards such as " Non-Destructive XRT Detection of Defects in Gallium Oxide Materials ".

      The meeting was held in accordance with the requirements of relevant state departments for group standards and the provisions of the "Management Measures for Group Standards of China Electronic Materials Industry Association". The review experts attending the meeting included He Dongjiang, director of the Materials Sub-Technical Committee of the National Semiconductor Equipment and Materials Standardization Committee, Li Suqing, secretary-general of the Materials Sub-Technical Committee of the National Semiconductor Equipment and Materials Standardization Committee, Guo Jianyue, former general manager of Hangzhou Semiconductor Wafer Co., Ltd. and Ma Chunxi, standardization advisor of the China Electronic Materials Industry Association. Zhang Junbao, deputy general manager of Shanghai Advanced Silicon Technology Co., LTD. Pei Yanli, professor of Sun Yat-sen University, and Zhang Song, senior engineer of the 46th Research Institute of China Electronics Technology Group Corporation.

      The group standard "Non-Destructive XRT Detection of Defects in Gallium Oxide Materials" was jointly formulated by China Resources Microelectronics Co., Ltd. as the leading unit, and the Institute of Industrial Science of Wuhan University, Hangzhou Fuyang District Gallium Valley Gallium Oxide Industry Development Service Center (Asian Gallium Oxide Alliance), and Hangzhou Fujia Gallium Technology Co., Ltd. as participating units. Dr. Meng Biao from China Resources Microelectronics Co., Ltd. made a project initiation report to the review experts and participants, providing a detailed introduction and explanation on the project's background, significance of initiation, research situation, initiating unit, and comparison of the current situation of domestic and international standards. The experts actively discussed the report content from aspects such as the comparison of detection methods, the comprehensiveness of detection results, the classification of defect types and corresponding feedback, put forward detailed suggestions and guiding ideas, and agreed to the project initiation of this standard.

      Hangzhou GAREN SEMI Co., LTD., also a Council Member unit, passed the review of two group standard drafts, namely " Testing Method for Dislocation Density of Gallium Oxide Single Crystal" and "β-Phase Gallium Oxide Homoepitaxial Wafer", at the meeting. During the meeting, experts actively discussed the contents of the drafts and put forward constructive suggestions such as adding sample chapters and conducting retests in multiple laboratories to confirm the precision.

The project initiation team of " Non-Destructive XRT Detection of Defects in Gallium Oxide Materials" took a group photo with Director He Dongjiang (fourth from the left), Chief Lin Jian (fourth from the right), and Secretary-General Li Suqing (third from the right)

      Through participating in the group standard project initiation meeting this time, the alliance learned the relevant procedures, deepened its understanding of group standards, gained a detailed concept of the cutting-edge information in Gallium Oxide materials and the semiconductor industry, increased the knowledge reserves and horizons of relevant personnel, and laid a solid foundation for providing more comprehensive and effective services to member units in the future.