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【Member News】GAREN SEMI's 8-inch Ga₂O₃ Substrates Verified by Shenzhen Pinghu Laboratory and Malvern Panalytical Asia-Pacific Application Center: Internationally Leading Quality
日期：2025-09-04阅读：67
In August 2025, Hangzhou GAREN Semiconductor Co., LTD. (hereinafter referred to as "GARENSEMI") announced that its 8-inch β-Ga2O3 substrate had passed inspections conducted by renowned domestic and international institutions, with the test results jointly released.
The third-party testing results indicate that the 8-inch substrate exhibits an XRD rocking curve FWHM of <30 arcsec, achieving the international leading level. The successful development of 8-inch high-quality β-Ga2O3 substrates marks that the industrial application of gallium oxide has entered a stage of accelerated implementation, which is an important milestone in the development of the industry.
TEST RESULTS-Shenzhen Pinghu Laboratroy
The sample tested was an 8-inch β-Ga2O3 substrate, with a total of 5 measurement points taken. The test results showed the XRD rocking curve FWHM ranged from 22 to 26 arcsec.
Third-party test results of 8-inch substrate XRD rocking curve FWHM（Shenzhen Pinghu Laboratroy）
TEST RESULTS - Malvern Panalytical
The sample tested was an 8-inch β-Ga2O3 substrate, with a total of 5 measurement points taken. The XRD rocking curve FWHM were：16.7 arcsec、16.2 arcsec、15.4 arcsec、15.3 arcsec、12.4 arcsec, respectively.
Third-party test results of 8-inch substrate XRD rocking curve FWHM（Malvern Panalytical）
The industrial significance of 8-inch
In March, 2025, GARENSEMI unveiled the world’s first fourth-generation semiconductor 8-inch β-Ga2O3 single crystal and processed it into 8-inch substrates, setting a new global record for the size of β-Ga2O3 single crystals. China’s β-Ga2O3 industry taking the lead in entering the 8-inch era has profound industrial significance:
First, the 8-inch β-Ga2O3 substrate is fully compatible with the existing 8-inch silicon production lines, significantly accelerating the progress of its industrialization.
Second, β-Ga2O3 substrate with larger diameter can remarkably improve its utilization with lower production costs and higher efficiency.
The 8-inch substrates have now commenced commercial sales and shipments
Currently, the commercially available β-Ga2O3 substrate wafers are primarily 2-inch and 4-inch, which are difficult to compatible with mainstream Fab production line equipment. This incompatibility increases the R&D difficulty and cost for downstream device manufacturers, hindering the adoption of β-Ga2O3.
These quality test results fully demonstrate that GARENSEMI's 8-inch wafers substrates exhibit excellent quality and can meet the production requirements of silicon-based 8-inch production lines. This breakthrough will significantly reduce the R&D difficulty and cost for downstream applications, thereby accelerating the industrialization process.
GARENSEMI has gradually achieved the industrialization of gallium oxide substrates, providing downstream customers with large-size, high-quality gallium oxide single crystal substrate products. GARENSEMI has now commenced commercial sales and shipments of its 8-inch substrates.
The vertical Bridgeman growth system self-developed by Garen for β-Ga2O3 is now fully open to sales
Garen not only provides β-Ga2O3 single crystal substrates, but also fully opens the sale of vertical Bridgeman crystal growth equipment and customized process packages for β-Ga2O3.
In September 2024, Garen launched its first self-developed vertical Bridgeman growth system for β-Ga2O3. This system is designed to maintain the high-temperature and high-oxygen environments required for β-Ga2O3 growth, with the capability of fully automated crystal growth. While manual intervention is minimized, the production efficiency and crystal quality are quite remarkable.
The equipment can obtain a variety of large-size single crystals with different crystal planes through process control, and support the upgrading to larger-size single crystals to meet the needs of universities, research institutes, and corporate customers for scientific research and production of β-Ga2O3 crystal growth. This VB method β-Ga2O3 crystal growth equipment and its process package have been fully opened for sale.
