【Others Papers】The Laser-Induced Periodic Surface Structures (LIPSS) generated by β-Ga₂O₃ under picosecond pulsed Laser interference

      Researchers from the University of Electronic Science and Technology of China Zhongshan Institute have published a dissertation titled "The Laser-Induced Periodic Surface Structures (LIPSS) generated by β-Ga₂O₃ under picosecond pulsed Laser interference" in Optics Communications

Abstract

      As an emerging wide bandgap semiconductor material, β-Ga2O3 single crystal has shown great application prospects in power devices, solar-blind detectors and gas sensors. However, its significant anisotropy and low mechanical strength lead to the occurrence of delamination and fragmentation in traditional processing, making it difficult to achieve high-precision complex processing. In this paper, micro-nano processing was carried out using picosecond pulsed laser. The damage threshold of (010) surface β-Ga2O3 under single picosecond pulsed laser irradiation was determined to be approximately 1.85 J/cm2 by the damage probability extrapolation method. With the increase of pulse number, the damage threshold decreased significantly and then tended to be stable, and the laser damage resistance of the material gradually tended to be stable. By controlling the laser energy density, the spatial frequency of the periodic structure can be regulated, and the selective preparation of high and low spatial frequency surface periodic structures was achieved.

DOI：

https://doi.org/10.1016/j.optcom.2025.132765