【Member Intro】FreeSpirit Instruments —— Regular Member

Unit Introduction

      FreeSpirit Instruments (Shanghai) Co., Ltd. (“FreeSpirit Instruments”) is a high-tech innovative enterprise specializing in the research, development, and manufacturing of precision surface metrology equipment. Built upon its independently developed technological foundation, the company has successfully launched flagship products including domestic Atomic Force Microscopes (AFM), White Light Interferometers (WLI), and integrated AFM–WLI systems.

      The core team members are all graduates of the Department of Precision Instruments at Tianjin University, with decades of technical expertise and hands-on experience in advanced metrology. Leveraging a collaborative structure of “Shanghai Headquarters + Tianjin R&D + Suzhou Manufacturing,” FreeSpirit Instruments has established a complete closed-loop system from technological innovation to industrial implementation. The company is committed to providing high-performance, stable, and reliable domestic precision metrology solutions for cutting-edge fields such as scientific research, compound semiconductors, Micro-LED, and next-generation display technologies.

      In recent years, gallium oxide, as a strategic frontier in ultra-wide bandgap semiconductor materials, has demonstrated significant potential in high-voltage power devices and deep ultraviolet optoelectronics. However, from substrate preparation to epitaxial growth, gallium oxide faces stringent process challenges. Drawing on its deep technical expertise, FreeSpirit Instruments provides a critical “measurement benchmark” for the gallium oxide industry chain.

      In substrate and epitaxy processes, FreeSpirit’s AFM product series, with sub-nanometer resolution, enables precise characterization of wafer surface morphology. By monitoring atomic-level roughness after chemical mechanical polishing (CMP), it effectively evaluates substrate quality. Meanwhile, AFM can probe microscopic defects on epitaxial surfaces, providing essential data support for process optimization.

      At the device development stage, AFM not only performs critical dimensional measurements but also enables multifunctional property characterization, such as surface potential mapping (KPFM) and piezoresponse analysis (PFM), helping researchers and engineers gain deeper insights into the electrical distribution and physical properties of gallium oxide materials.

      In addition, by integrating White Light Interferometry (WLI) for fast, non-contact, large-area surface measurement, FreeSpirit offers a full-scale metrology solution ranging from macroscopic flatness and step height to microscopic morphology.

      FreeSpirit Instruments is committed to leveraging high-quality domestic precision metrology technologies to help industry partners accurately capture the “subtle details” of gallium oxide materials, thereby supporting the high-quality development of China’s advanced semiconductor industry.

 

Achievements Showcase (Core Products)

AFM-Baritone

Large-Platform Automated Atomic Force Microscope

      The FreeSpirit 200 mm AFM-Baritone is a large-format atomic force microscope engineered for both advanced research and high-end industrial applications. Equipped with a fully automated 200 mm sample stage, it enables precise morphology and property characterization for wafers up to 8 inches, as well as various other large-scale substrates.

      ●Features a three-dimensional orthogonal scanning probe, eliminating the size and weight limitations associated with bottom-scanning architectures

      ●Standard configuration includes automatic probe exchange and auto laser alignment, supporting variable-speed scanning and adaptive gain tuning

      ●XYZ scan range: 100 μm × 100 μm × 15 μm

      ●Z-axis noise level: ≤ 0.05 nm (RMS)

 

AFM-Piccolo

Desktop Integrated Atomic Force Microscope

      The FreeSpirit AFM-Piccolo is a benchtop AFM specifically designed for research integration. It features an ultra-slim optical lever probe head with a fully open architecture above and in front of the probe, making it the ideal solution for in-situ integration with high-resolution optical microscopy systems.

      ●Supports samples with diameter ≤ 30 mm and thickness ≤ 5 mm

      ●XYZ scan range: 100 μm × 100 μm × 5 μm (optional: 10 μm / 15 μm / 20 μm)

      ●Z-axis noise level: ≤ 0.04 nm (RMS)

 

 

WLI-Marimba

Compact White Light Interferometer

      The FreeSpirit WLI-Marimba is a streamlined white light interferometer (WLI) designed for both industrial quality control and laboratory research. Compatible with a wide range of materials, it provides rapid surface topography acquisition and analysis. The system is highly customizable, offering a cost-effective solution for high-standard specialized measurement needs.

      ●Compact structural design with a true benchtop footprint

      ●Lightweight design, with a total weight of only 20 kg for easy mobility

      ●Vertical scanning range of 100 μm, covering most application requirements

      ●Modular configuration options for flexible functionality expansion and optimized measurement setups

 

AFM–WLI Duet

Coaxial Integrated AFM–WLI System

      The AFM–WLI Duet is a benchtop hybrid system that coaxially integrates the AFM-Piccolo with the Linnik-type white light interferometer, WLI-Marimba. By combining the rapid, large-area survey capabilities of WLI with the high-resolution, nanometer-scale characterization of AFM, the Duet provides a seamless, in-situ, cross-scale surface metrology solution.

      For more technical specifications, please visit: https://www.frsinst.com/download/

 

Media Platforms

Contact Information
      Tel: +86-21-65208265
      Mobile: +86-177-2115-8621
      Pre-sales Consultation: +86-189-9439-2037
      Email: info@frsinst.com