【Others Papers】First-principles study on the structural characteristics of layered doped β-Ga₂O₃ with (−201) crystal plane
日期:2026-08-26阅读:118
Researchers from Xi’an University of Posts & Telecommunications have published a dissertation titled " First-principles study on the structural characteristics of layered doped β-Ga₂O₃ with (−201) crystal plane " in Journal of Vacuum Science & Technology A.
Abstract
As an ultrawide-bandgap semiconductor, β-Ga₂O₃ has good application prospects in power devices and solar-blind photodetectors. First-principles calculations are commonly used to study the doped bulk β-Ga₂O₃, whereas layered doped β-Ga₂O₃ has not been constructed to simulate the layer-by-layer growth mode. In this paper, layered doped β-Ga₂O₃ with the (−201) crystal plane is constructed, and the structural characteristics are comprehensively studied by first-principles calculations. The formation energy calculation demonstrates the preferred coordination for different dopants. The optimized atomic structures indicate the obvious lattice deformation except for the Al dopants. Uneven dopant distribution is observed for Ge or Sn dopants, while Ca and Sr dopants result in lattice expansion around the dopant sites. The influence of the structural characteristics on the charge transfer is revealed by both differential charge distribution and Bader charge analysis. The results are beneficial for illustrating the mechanism of layered doped β-Ga₂O₃ and related microelectronic devices.
DOI:
https://doi.org/10.1116/6.0005516

