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【Conference Papers】Epitaxial growth of β-(AlₓGa₁₋ₓ)₂O₃ and β-(InₓGa₁₋ₓ)₂O₃ alloy thin films on (010) β-Ga₂O₃ substrates via mist chemical vapor deposition
日期：2023-05-05
阅读：146
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