行业标准
Member Intro

【Member Intro】Shandong Jingsheng Electronic Technology Co.,Ltd —— Regular Member

日期:2024-03-15阅读:168

Company Profile

      Shandong Jingsheng Electronic Technology Co., Ltd. is located in Jinan, Spring City, is a focus on wide band gap semiconductor equipment research and development and production of state-level high-tech enterprises, research and development scope covers semiconductor equipment development, crystal growth process, has formed a series of independent intellectual property rights, to achieve advanced technology independent control. It is committed to becoming a key equipment supplier of wide band gap semiconductor in the industry, and has built a wide band gap semiconductor equipment manufacturing site in Changqing District, Jinan City.

      The main products promoted are the third and fourth generation of high-end semiconductor equipment, including halide vapor phase epitaxy (HVPE) equipment for Gallium Oxide growth, EFG crystal furnace, and Gallium Oxide vertical Bridgman crystal growth furnace.

Corporate Culture

Dedication, Loyalty, Unity, Enterprising is the spirit of company, the integrity of the society, customer satisfaction is proud of the business philosophy of the enterprise!

Web: www.sdjsdz.com

Tel: 13006586313

Company Honors and Qualifications

Mainly Promote Products

1、Halide vapor phase epitaxy (HVPE) equipment for Gallium Oxide: 2/4 inch

Product Features:

High growth rate.

With high transverse and longitudinal growth ratio and few holes, large area thick film can be grown.

Single crystal growth rate: ≥200 microns/hour.

Gallium Oxide homogeneous epitaxial thickness: >20μm.

Product size: 2/4in.

 

2、EFG crystal growth furnace

Product features:

The crystal growth furnace can realize the growth of ultra-wide band gap single crystal semiconductor materials by EFG guide mode pulling method. Ultra-wide band gap single crystal semiconductor materials can be grown by EFG guide mode pulling method with high frequency heating and special thermal field structure design.

The equipment can correspond to the growth requirements of 2-6 inch single crystal materials, and can meet the customized design requirements.

 

3、Gallium Oxide Vertical Bridgman crystal growth furnace

Product Features:

Temperature range: 100-1850℃.

Imported heating body, working temperature accuracy of ±2℃.

The crucible has a rotating function, and the rotating speed and direction can be set according to the need.

The equipment can be used for 2-4 inch single crystal growth needs, can be customized according to customer needs other functions required.

 

4、Seed Crystal Bonding Equipment (flexible indenter/hard indenter)

Product Use:

The equipment can be used for pre-growth seed crystal bonding of SiC,GaN and ALN, and can also be used for bonding in the crystal machining.

Product features:

The paste seed crystal can be kept at 2300℃ high temperature.

100% adhesion without bubbles.

High flatness.

The surface of the wafer is clean and no impurities are adsorbed.

Product Parameters:

The heating tray adopts disc type low voltage resistance heating, the heating temperature is uniform, the use is safe, the operation is convenient.

The lower part of the tray is installed with a pressure sensor, which accurately displays the pressure of the workpiece.

Common temperature: flexible indenter (room temperature -200℃).

Common temperature: hard indenter (room temperature -600℃).

Maximum weight: 1000 kg.

Vacuum: <10 Pa.

Indenter size: 250 mm.

 

5、KOH Corrosion Furnace

Product Introduction:

This equipment is mainly used for silicon wafer corrosion process, can also be used for other materials special process treatment. Technical specifications

Product features:

Double thermocouple temperature control, corrosion fluid temperature control accuracy ±1℃.

The lifting part adopts servo motor, high positioning accuracy; The rotating part adopts servo motor, the temperature uniformity is more reliable.

The cassette is easy to disassemble.

Can corrode 1-5 pieces at a time.

Safety interlock.

Using touch screen +PLC control mode, simple operation, process editing and historical data can be recorded and exported, you can draw temperature real-time curve and historical curve.

The maximum temperature is 700℃.