
【Domestic Papers】Researchers From the Shanghai Institute of Optics and Fine Mechanics Investigates the (-101) Plane in β-Ga₂O₃ Crystal
日期:2024-09-27阅读:150
Researchers from the Shanghai Institute of Optics and Fine Mechanics have published a dissertation titled "The study of (-101) plane in β-Ga2O3 crystal" in Applied Surface Science.
Abstract
This study confirms that the symmetric plane of (001) with respect to the twin boundary in β-Ga2O3 is the (101),and it has been systematically characterized. X-ray diffraction has determined that diffraction peaks appear only at positions where the l component of the miller indices hkl is even, and these positions coincide with the diffraction peak positions of the (001) plane. The termination atomic arrangement of the (-101) plane is not exclusively composed of gallium or oxygen atoms, it exists in two forms with hanging bond densities of 1.614 × 1015/cm2 and 2.421 × 1015/cm2, respectively. Wet etching experiments on the (-101) plane reveal distinct defect morphologies compared to the (001) plane, indicating its suitability for distinguishing between these two planes. The Raman modes of (-101) plane coincide with other crystal planes. Through optical transmission spectra, X-ray photoelectron spectra, and Ultraviolet photoelectron spectra, its bandgap width Eg of 4.76 eV, the valence band maximum EVBM of 3.64 eV and the Schottky barrier height Φsurf of 1.12 eV were determined. Compared to studies of other crystal planes, it is believed that the (-101) plane also possesses similar application potential.
Fig. 1. (a) photo of β-Ga2O3 crystal, (b) the crystal under polarized light.
Fig. 2. XRD results of (a) (001) plane and (b) (-101) plane.
DOI:doi.org/10.1016/j.apsusc.2024.161054